تصميم حاسوبي لمنظومة العدسات المغناطيسية المكثفة المزدوجة في المجهر الإلكتروني الماسح

الملخص EN

The present work is dealing with an intensive study for the optical performance of the double magnetic condenser lens system in order to obtain an optimum design for the condenser lenses in the illumination system for scaning electron microscope SEM.

Four models of double magnetic lenses have been designed of equal geometrical dimensions and of different geometrical shape of the pole.

It is found that the geometrical shapes of the pole has a great effect on the focal properties such as (focal length, demagnification of source size and the electron beam diameter calculation), which depended on the current density passing through the double magnetic condenser lens system.

In order to get more demagnification in spot size, we must use the strong mode.

Finally, a calibration curve of the scanning electron microscope SEM has been drawn and it can get all the information about the electron beam.