تأثير ظروف الترسيب على التوصيلية الكهربائية لأغشية ZnO المرسبة بطريقة الترسيب البخاري الكيميائي (CVD)‎

الملخص EN

ZnO thin films on glass substrate were prepared by chemical vapor deposition (CVD) using zinc acetate as a starting material.

Electrical properties of the films deposited at various substrate temperatures and sample position inside the chamber were investigated.

Maximum conductivity is obtained for the film deposited at 550°C and at a position 16 cm far from the inlet side of the gases.