دراسة أطياف الانعكاسية لأغشية نتريد الكربون غير المتبلورة المحضرة بطريقة التذرية الليزرية

الملخص EN

Amorphous carbon nitride thin films were synthesized by Pulsed Laser Deposition (PLD) of graphite target by Nd:YAG -pulsed laser.

The films were deposited onto unheated glass and silicon (100) substrates in nitrogen and Nitrogen Plasma After Glow(NPA).

Films were analyzed by UV-Vis/NIR Spectrometer, XPS and scanning electron microscopy (SEM) in order to investigate the effect of nitrogen plasma afterglow and nitrogen pressure on both reflectivity spectrum and refractive index.

The results have shown that structural effects of pressure and plasma affect on the optical properties by controlling the films content of C(sp3 ).

In addition we found that the films content of C(sp3 ) have a significant role in determining the refractive index.