Titanium Dioxide-Based 64∘ YX LiNbO3 Surface Acoustic Wave Hydrogen Gas Sensors

الملخص EN

Amorphous titanium dioxide (TiO2) and gold (Au) doped TiO2-based surface acoustic wave (SAW) sensors have been investigated as hydrogen gas detectors.

The nanocrystal-doped TiO2 films were synthesized through a sol-gel route, mixing a Ti-butoxide-based solution with diluted colloidal gold nanoparticles.

The films were deposited via spin coating onto 64∘ YX LiNbO3 SAW transducers in a helium atmosphere.

The SAW gas sensors were operated at various temperatures between 150 and 310∘C.

It was found that gold doping on TiO2 increased the device sensitivity and reduced the optimum operating temperature.