SRIM simulation of parameters affecting sputtering yield and chemical structure using Kr, Cu and Pb ions bombardment
Joint Authors
Abd al-Rahim, A. M.
Shihata, M. M.
Radwan, S. I.
Source
Arab Journal of Nuclear Sciences and Applications
Issue
Vol. 50, Issue 4 (30 Oct. 2017), pp.193-200, 8 p.
Publisher
The Egyptian Society of Nuclear Science and Applications
Publication Date
2017-10-30
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Topics
Abstract EN
Sputtering yields of various extracted kyrpton , copper and lead ions with energies from 5 – 50 KeV on Polycarbonate/ polybutylene terephthalate film were investigated.
SRIM computer program was used to determine the sputtering yield and supsequntly the change in chemical structure.
The relation between the ion beam energy and sputtering yield of hydrogen, carbon and oxygen was studied.
The effect of ion beam incidence angle on Polycarbonate/ polybutylene terephthalate film was investigated.
The total sputtering yield at an energy of 50 KeV was 1.986, 2.331 and 2.886 for copper, krypton and lead ions respectively.
It is found that the sputtering yield for hydrogen is the highest.
The sputtering yield increases by decreasing the atomic number of the element in the target.
American Psychological Association (APA)
Shihata, M. M.& Radwan, S. I.& Abd al-Rahim, A. M.. 2017. SRIM simulation of parameters affecting sputtering yield and chemical structure using Kr, Cu and Pb ions bombardment. Arab Journal of Nuclear Sciences and Applications،Vol. 50, no. 4, pp.193-200.
https://search.emarefa.net/detail/BIM-761616
Modern Language Association (MLA)
Shihata, M. M.…[et al.]. SRIM simulation of parameters affecting sputtering yield and chemical structure using Kr, Cu and Pb ions bombardment. Arab Journal of Nuclear Sciences and Applications Vol. 50, no. 4 (Oct. 2017), pp.193-200.
https://search.emarefa.net/detail/BIM-761616
American Medical Association (AMA)
Shihata, M. M.& Radwan, S. I.& Abd al-Rahim, A. M.. SRIM simulation of parameters affecting sputtering yield and chemical structure using Kr, Cu and Pb ions bombardment. Arab Journal of Nuclear Sciences and Applications. 2017. Vol. 50, no. 4, pp.193-200.
https://search.emarefa.net/detail/BIM-761616
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 199-200
Record ID
BIM-761616
