Characteristics of Bilayer Molybdenum Films Deposited Using RF Sputtering for Back Contact of Thin Film Solar Cells
Joint Authors
Wang, Sea-Fue
Yang, Hsiao-Ching
Liu, Chien-Fong
Bor, Huy-Yun Y.
Source
Advances in Materials Science and Engineering
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-06-17
Country of Publication
Egypt
No. of Pages
6
Abstract EN
Mo films prepared under a single deposition condition seldom simultaneously obtain a low resistivity and a good adhesion necessary for use in solar cells.
In order to surmount the obstacle, bilayer Mo films using DC sputtering at a higher working pressure and a lower working pressure have been attempted as reported in the literature.
In this study, RF sputtering with different powers in conjunction with different working pressures was explored to prepare bilayer Mo film.
The first bottom layer was grown at a RF sputtering power of 30 W and a working pressure of 12 mTorr, and the second top layer was deposited at 100 W and 4.5 mTorr.
The films revealed a columnar growth with a preferred orientation along the (110) plane.
The bilayer Mo films reported an electrical resistivity of 6.35 × 10−5 Ω-cm and passed the Scotch tape test for adhesion to the soda-lime glass substrate, thereby qualifying the bilayer Mo films for use as back metal contacts for CIGS substrates.
American Psychological Association (APA)
Wang, Sea-Fue& Yang, Hsiao-Ching& Liu, Chien-Fong& Bor, Huy-Yun Y.. 2014. Characteristics of Bilayer Molybdenum Films Deposited Using RF Sputtering for Back Contact of Thin Film Solar Cells. Advances in Materials Science and Engineering،Vol. 2014, no. 2014, pp.1-6.
https://search.emarefa.net/detail/BIM-1015719
Modern Language Association (MLA)
Wang, Sea-Fue…[et al.]. Characteristics of Bilayer Molybdenum Films Deposited Using RF Sputtering for Back Contact of Thin Film Solar Cells. Advances in Materials Science and Engineering No. 2014 (2014), pp.1-6.
https://search.emarefa.net/detail/BIM-1015719
American Medical Association (AMA)
Wang, Sea-Fue& Yang, Hsiao-Ching& Liu, Chien-Fong& Bor, Huy-Yun Y.. Characteristics of Bilayer Molybdenum Films Deposited Using RF Sputtering for Back Contact of Thin Film Solar Cells. Advances in Materials Science and Engineering. 2014. Vol. 2014, no. 2014, pp.1-6.
https://search.emarefa.net/detail/BIM-1015719
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1015719