Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode
Joint Authors
Shevchenko, E. F.
Tarala, V. A.
Shevchenko, M. Yu.
Titarenko, A. A.
Source
Advances in Materials Science and Engineering
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-01-23
Country of Publication
Egypt
No. of Pages
6
Abstract EN
Carbon diamond-like thin films on a silicon substrate were deposited by direct reactive ion beam method with an ion source based on Penning direct-current discharge system with cold hollow cathode.
Deposition was performed under various conditions.
The pressure (12–200 mPa) and the plasma-forming gas composition consisting of different organic compounds and hydrogen (C3H8, CH4, Si(CH3)2Cl2, H2), the voltage of accelerating gap in the range 0.5–5 kV, and the substrate temperature in the range 20–850°C were varied.
Synthesized films were researched using nanoindentation, Raman, and FTIR spectroscopy methods.
Analysis of the experimental results was made in accordance with a developed model describing processes of growth of the amorphous and crystalline carbon materials.
American Psychological Association (APA)
Shevchenko, E. F.& Tarala, V. A.& Shevchenko, M. Yu.& Titarenko, A. A.. 2014. Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode. Advances in Materials Science and Engineering،Vol. 2014, no. 2014, pp.1-6.
https://search.emarefa.net/detail/BIM-1015931
Modern Language Association (MLA)
Shevchenko, E. F.…[et al.]. Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode. Advances in Materials Science and Engineering No. 2014 (2014), pp.1-6.
https://search.emarefa.net/detail/BIM-1015931
American Medical Association (AMA)
Shevchenko, E. F.& Tarala, V. A.& Shevchenko, M. Yu.& Titarenko, A. A.. Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode. Advances in Materials Science and Engineering. 2014. Vol. 2014, no. 2014, pp.1-6.
https://search.emarefa.net/detail/BIM-1015931
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1015931