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Characterisation of C–F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL2O3–TiC Substrate
Joint Authors
Patthanasettakul, V.
Limcharoen, Alonggot
Pakpum, Chupong
Siangchaew, Krisda
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-06-13
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
C–F polymer redeposition is generated on the etched sidewall of the patterned air-bearing surface (ABS).
This C–F polymer is a by-product from fluorine-based plasma using a Surface Technology Systems multiplex-pro air-bearing etch (ABE).
The morphology of the re-deposition and the composite element was observed by a scanning electron microscope (SEM).
The chemical bonding results were characterised via X-ray photoelectron spectroscopy, attenuated total reflected infrared spectroscopy and visible Raman spectroscopy.
The purpose of this work is to demonstrate a modification of AlF3 re-deposition to C–F polymer re-deposition, which is easily stripped out by an isopropyl alcohol-based solution.
The benefit of this research is the removal of the re-deposition in the resist strip process without additional cleaning process steps.
American Psychological Association (APA)
Limcharoen, Alonggot& Patthanasettakul, V.& Pakpum, Chupong& Siangchaew, Krisda. 2013. Characterisation of C–F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL2O3–TiC Substrate. Journal of Nanomaterials،Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-1031598
Modern Language Association (MLA)
Limcharoen, Alonggot…[et al.]. Characterisation of C–F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL2O3–TiC Substrate. Journal of Nanomaterials No. 2013 (2013), pp.1-6.
https://search.emarefa.net/detail/BIM-1031598
American Medical Association (AMA)
Limcharoen, Alonggot& Patthanasettakul, V.& Pakpum, Chupong& Siangchaew, Krisda. Characterisation of C–F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL2O3–TiC Substrate. Journal of Nanomaterials. 2013. Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-1031598
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1031598