Nonlinear Current Control for Reluctance Actuator with Hysteresis Compensation
Joint Authors
Liu, Yu-Ping
Liu, Kang-Zhi
Yang, Xiaofeng
Source
Journal of Control Science and Engineering
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-10-21
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Electronic engineering
Information Technology and Computer Science
Abstract EN
The next-generation fine stage of the wafer scanner needs a suitable actuator to meet the requirements of high speed, high acceleration, and high precision.
The voice coil actuator is no longer the best choice because of its large size and the heat dissipation is difficult to solve.
The reluctance actuator can provide a big force based on a unique property of small volume and low current, making it a very suitable candidate.
But the strong nonlinearity such as the hysteresis between the current and force limits the reluctance actuator applications in nanometer positioning.
This paper proposes a nonlinear current control configuration with hysteresis compensation using the adaptive multilayer neural network.
Simulation results show that the hysteresis compensator is effective in overcoming the hysteresis and is promising in precision control applications.
American Psychological Association (APA)
Liu, Yu-Ping& Liu, Kang-Zhi& Yang, Xiaofeng. 2014. Nonlinear Current Control for Reluctance Actuator with Hysteresis Compensation. Journal of Control Science and Engineering،Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-1040185
Modern Language Association (MLA)
Liu, Yu-Ping…[et al.]. Nonlinear Current Control for Reluctance Actuator with Hysteresis Compensation. Journal of Control Science and Engineering No. 2014 (2014), pp.1-7.
https://search.emarefa.net/detail/BIM-1040185
American Medical Association (AMA)
Liu, Yu-Ping& Liu, Kang-Zhi& Yang, Xiaofeng. Nonlinear Current Control for Reluctance Actuator with Hysteresis Compensation. Journal of Control Science and Engineering. 2014. Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-1040185
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1040185