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Formation of Three-Way Scanning Electron Microscope Moiré on MicroNanostructures
Joint Authors
Wang, Qinghua
Kishimoto, Satoshi
Tsuda, Hiroshi
Source
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-02-11
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Medicine
Information Technology and Computer Science
Abstract EN
Three-way scanning electron microscope (SEM) moiré was first generated using a designed three-way electron beam (EB) in an SEM.
The spot-type three-way SEM moiré comes from the interference between the three-way EB and the specimen grating in which the periodic cells are arranged in a triangular manner.
The deformation and the structure information of the specimen grating in three directions can be simultaneously obtained from the three-way SEM moiré.
The design considerations of the three-way EB were discussed.
As an illustration, the three-way SEM moiré spots produced on a silicon slide were presented.
The proposed three-way SEM moiré method is expected to characterize micro/nanostructures in triangular or hexagonal arrangements in three directions at the same time.
American Psychological Association (APA)
Wang, Qinghua& Kishimoto, Satoshi& Tsuda, Hiroshi. 2014. Formation of Three-Way Scanning Electron Microscope Moiré on MicroNanostructures. The Scientific World Journal،Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1049059
Modern Language Association (MLA)
Wang, Qinghua…[et al.]. Formation of Three-Way Scanning Electron Microscope Moiré on MicroNanostructures. The Scientific World Journal No. 2014 (2014), pp.1-8.
https://search.emarefa.net/detail/BIM-1049059
American Medical Association (AMA)
Wang, Qinghua& Kishimoto, Satoshi& Tsuda, Hiroshi. Formation of Three-Way Scanning Electron Microscope Moiré on MicroNanostructures. The Scientific World Journal. 2014. Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1049059
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1049059