Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures
Joint Authors
Alarcón, L. Salazar
Martínez, E. D.
Rodríguez, L. M.
Pastoriza, H.
Source
Advances in Materials Science and Engineering
Issue
Vol. 2016, Issue 2016 (31 Dec. 2016), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2016-05-22
Country of Publication
Egypt
No. of Pages
7
Abstract EN
During SU-8 standard photolithography process, a patterned topography is formed with a characteristic height profile produced by the different shrinkage of the UV exposed and masked regions.
We study the change of wettability, film solubility, and topographic modifications on SU-8 films of different thicknesses and show its relevance in the formation of spinning-flow arrays on top layers made from positive photoresists.
Also, considerable contrast in film solubility and surface energy as observed from contact angle measurements is produced.
Interface diffusion of the photoresists was also observed and followed by Rutherford Back Scattering.
We discuss the derivations of the mentioned effects concerning the limitations to multilayered microfabrication processes and possibilities to take advantage of the surface profiles obtained.
American Psychological Association (APA)
Alarcón, L. Salazar& Martínez, E. D.& Rodríguez, L. M.& Pastoriza, H.. 2016. Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures. Advances in Materials Science and Engineering،Vol. 2016, no. 2016, pp.1-7.
https://search.emarefa.net/detail/BIM-1096197
Modern Language Association (MLA)
Alarcón, L. Salazar…[et al.]. Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures. Advances in Materials Science and Engineering No. 2016 (2016), pp.1-7.
https://search.emarefa.net/detail/BIM-1096197
American Medical Association (AMA)
Alarcón, L. Salazar& Martínez, E. D.& Rodríguez, L. M.& Pastoriza, H.. Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures. Advances in Materials Science and Engineering. 2016. Vol. 2016, no. 2016, pp.1-7.
https://search.emarefa.net/detail/BIM-1096197
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1096197