Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties
Joint Authors
Flege, Stefan
Hatada, Ruriko
Hanauer, Andreas
Ensinger, Wolfgang
Morimura, Takao
Baba, Koumei
Source
Advances in Materials Science and Engineering
Issue
Vol. 2017, Issue 2017 (31 Dec. 2017), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2017-01-23
Country of Publication
Egypt
No. of Pages
8
Abstract EN
Metal-containing diamond-like carbon (Me-DLC) films were prepared by a combination of plasma source ion implantation (PSII) and reactive magnetron sputtering.
Two metals were used that differ in their tendency to form carbide and possess a different sputter yield, that is, Cu with a relatively high sputter yield and Ti with a comparatively low one.
The DLC film preparation was based on the hydrocarbon gas ethylene (C2H4).
The preparation technique is described and the parameters influencing the metal content within the film are discussed.
Film properties that are changed by the metal addition, such as structure, electrical resistivity, and friction coefficient, were evaluated and compared with those of pure DLC films as well as with literature values for Me-DLC films prepared with a different hydrocarbon gas or containing other metals.
American Psychological Association (APA)
Flege, Stefan& Hatada, Ruriko& Hanauer, Andreas& Ensinger, Wolfgang& Morimura, Takao& Baba, Koumei. 2017. Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties. Advances in Materials Science and Engineering،Vol. 2017, no. 2017, pp.1-8.
https://search.emarefa.net/detail/BIM-1124997
Modern Language Association (MLA)
Flege, Stefan…[et al.]. Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties. Advances in Materials Science and Engineering No. 2017 (2017), pp.1-8.
https://search.emarefa.net/detail/BIM-1124997
American Medical Association (AMA)
Flege, Stefan& Hatada, Ruriko& Hanauer, Andreas& Ensinger, Wolfgang& Morimura, Takao& Baba, Koumei. Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties. Advances in Materials Science and Engineering. 2017. Vol. 2017, no. 2017, pp.1-8.
https://search.emarefa.net/detail/BIM-1124997
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1124997