Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology
Joint Authors
Huang, Q. A.
Su, Jiale
Zhang, Xinwei
Zhou, Guoping
Gu, Jianjian
Xia, Changfeng
Zhou, Zai-Fa
Source
Issue
Vol. 2019, Issue 2019 (31 Dec. 2019), pp.1-10, 10 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2019-04-22
Country of Publication
Egypt
No. of Pages
10
Main Subjects
Abstract EN
This paper presents a piezoresistive barometric pressure sensor fabricated by using a Silicon-on-Nothing (SON) technology.
Array of silicon trenches were annealed in hydrogen environment to form continuing crystalline silicon membrane over a vacuum cavity.
Epitaxial growth on the silicon membrane is then completed for the desired thickness.
All processes are CMOS compatible and performed on the front side of the silicon wafer.
The piezoresistive barometric pressure sensor has been demonstrated with pressure hysteresis as low as 0.007%.
American Psychological Association (APA)
Su, Jiale& Zhang, Xinwei& Zhou, Guoping& Gu, Jianjian& Xia, Changfeng& Zhou, Zai-Fa…[et al.]. 2019. Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology. Journal of Sensors،Vol. 2019, no. 2019, pp.1-10.
https://search.emarefa.net/detail/BIM-1191299
Modern Language Association (MLA)
Su, Jiale…[et al.]. Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology. Journal of Sensors No. 2019 (2019), pp.1-10.
https://search.emarefa.net/detail/BIM-1191299
American Medical Association (AMA)
Su, Jiale& Zhang, Xinwei& Zhou, Guoping& Gu, Jianjian& Xia, Changfeng& Zhou, Zai-Fa…[et al.]. Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology. Journal of Sensors. 2019. Vol. 2019, no. 2019, pp.1-10.
https://search.emarefa.net/detail/BIM-1191299
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1191299