PMMA-Assisted Plasma Patterning of Graphene
Joint Authors
Bobadilla, Alfredo D.
Ocola, Leonidas E.
Sumant, Anirudha V.
Kaminski, Michael
Seminario, Jorge
Source
Issue
Vol. 2018, Issue 2018 (31 Dec. 2018), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2018-08-23
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Abstract EN
Microelectronic fabrication of Si typically involves high-temperature or high-energy processes.
For instance, wafer fabrication, transistor fabrication, and silicidation are all above 500°C.
Contrary to that tradition, we believe low-energy processes constitute a better alternative to enable the industrial application of single-molecule devices based on 2D materials.
The present work addresses the postsynthesis processing of graphene at unconventional low temperature, low energy, and low pressure in the poly methyl-methacrylate- (PMMA-) assisted transfer of graphene to oxide wafer, in the electron-beam lithography with PMMA, and in the plasma patterning of graphene with a PMMA ribbon mask.
During the exposure to the oxygen plasma, unprotected areas of graphene are converted to graphene oxide.
The exposure time required to produce the ribbon patterns on graphene is 2 minutes.
We produce graphene ribbon patterns with ∼50 nm width and integrate them into solid state and liquid gated transistor devices.
American Psychological Association (APA)
Bobadilla, Alfredo D.& Ocola, Leonidas E.& Sumant, Anirudha V.& Kaminski, Michael& Seminario, Jorge. 2018. PMMA-Assisted Plasma Patterning of Graphene. Journal of Nanotechnology،Vol. 2018, no. 2018, pp.1-8.
https://search.emarefa.net/detail/BIM-1195657
Modern Language Association (MLA)
Bobadilla, Alfredo D.…[et al.]. PMMA-Assisted Plasma Patterning of Graphene. Journal of Nanotechnology No. 2018 (2018), pp.1-8.
https://search.emarefa.net/detail/BIM-1195657
American Medical Association (AMA)
Bobadilla, Alfredo D.& Ocola, Leonidas E.& Sumant, Anirudha V.& Kaminski, Michael& Seminario, Jorge. PMMA-Assisted Plasma Patterning of Graphene. Journal of Nanotechnology. 2018. Vol. 2018, no. 2018, pp.1-8.
https://search.emarefa.net/detail/BIM-1195657
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1195657