Fabrication and Electrical Characterization of Multiwalled Carbon Nanotube-Based Circuit at Room Temperature

Abstract EN

Multiwalled carbon nanotube (MWCNT) deposited on a pair of predetermined aluminum electrodes treated with the (3-Aminopropyl)-triethoxysilane (APTES) self-assembled monolayers (SAMs).

The MWCNT bridges electrodes and forms electrode/MWCNT/electrode circuit on silicon with 500 nm silicon dioxide.

Then the Metal (Ti/Au) pads were fabricated on MWCNT to bury the MWCNT into metal electrodes.

The electrical properties of MWCNT-based circuits before and after the fabrication of metal pads were characterized.

Results indicate that metal pads on MWCNT improved the electrical properties MWCNT-based circuit largely.