Thermal Stability and Tribological Performance of DLC-Si–O Films
Joint Authors
Watanabe, Shuichi
Moolsradoo, Nutthanun
Abe, Shinya
Source
Advances in Materials Science and Engineering
Issue
Vol. 2011, Issue 2011 (31 Dec. 2011), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-10-25
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Engineering Sciences and Information Technology
Abstract EN
The thermal stability and tribological performance of silicon- and oxygen-incorporated diamond-like carbon films were investigated.
The DLC-Si-O films were deposited using plasma-based ion implantation (PBII) method.
The deposited films were annealed at 400°C, 600°C, and 750°C for 1 hour in vacuum, in argon, and in air atmospheres.
Film properties were investigated using the Fourier transforms infrared spectroscopy, Raman spectroscopy, energy dispersive X-ray spectroscopy, and a ball-on-disk friction tester.
The structures of the DLC-Si-O films with a low Si content (≤25 at.%Si, ≤1 at.%O) and high Si content (>25 at.%Si, >1 at.%O) were not affected by the thermal annealing in vacuum at 400°C and 600°C, respectively, while they were affected by thermal annealing in argon and in air at 400°C.
Film with 34 at.%Si and 9 at.%O after annealing demonstrated almost constant atomic contents until annealing at 600°C in vacuum.
The friction coefficient of DLC-Si–O films with 34 at.%Si and 9 at.%O was shown to be relatively stable, with a friction coefficient of 0.04 before annealing and 0.05 after annealing at 600°C in vacuum.
Moreover, the low friction coefficient of film annealed at 600°C in vacuum with 34 at.%Si and 9 at.%O was corresponded with low wear rate of 1.85 × 10-7 mm3/Nm.
American Psychological Association (APA)
Moolsradoo, Nutthanun& Abe, Shinya& Watanabe, Shuichi. 2011. Thermal Stability and Tribological Performance of DLC-Si–O Films. Advances in Materials Science and Engineering،Vol. 2011, no. 2011, pp.1-7.
https://search.emarefa.net/detail/BIM-475197
Modern Language Association (MLA)
Moolsradoo, Nutthanun…[et al.]. Thermal Stability and Tribological Performance of DLC-Si–O Films. Advances in Materials Science and Engineering No. 2011 (2011), pp.1-7.
https://search.emarefa.net/detail/BIM-475197
American Medical Association (AMA)
Moolsradoo, Nutthanun& Abe, Shinya& Watanabe, Shuichi. Thermal Stability and Tribological Performance of DLC-Si–O Films. Advances in Materials Science and Engineering. 2011. Vol. 2011, no. 2011, pp.1-7.
https://search.emarefa.net/detail/BIM-475197
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-475197