A Novel Nanoscale FDSOI MOSFET with Block-Oxide
Joint Authors
Eng, Yi-Chuen
Lin, Po-Hsieh
Lin, Jyi-Tsong
Source
Active and Passive Electronic Components
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-02-18
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Abstract EN
We demonstrate improved device performance by applying oxide sidewall spacer technology to a block-oxide-enclosed Si body to create a fully depleted silicon-on-insulator (FDSOI) nMOSFET, which overcomes the need for a uniform ultrathin silicon film.
The presence of block-oxide along the sidewalls of the Si body significantly reduces the influence of drain bias over the channel.
The proposed FDSOI structure therefore outperforms conventional FDSOI with regard to its drain-induced barrier lowering (DIBL), on/off current ratio, subthreshold swing, and threshold voltage rolloff.
The new FDSOI structure is in fact shown to behave similarly to an ultrathin body (UTB) SOI but without the associated disadvantages and technological challenges of the ultrathin film, because a thick Si body allows for reduced sensitivity to self-heating, thereby improving thermal stability.
American Psychological Association (APA)
Lin, Jyi-Tsong& Eng, Yi-Chuen& Lin, Po-Hsieh. 2013. A Novel Nanoscale FDSOI MOSFET with Block-Oxide. Active and Passive Electronic Components،Vol. 2013, no. 2013, pp.1-9.
https://search.emarefa.net/detail/BIM-486323
Modern Language Association (MLA)
Lin, Jyi-Tsong…[et al.]. A Novel Nanoscale FDSOI MOSFET with Block-Oxide. Active and Passive Electronic Components No. 2013 (2013), pp.1-9.
https://search.emarefa.net/detail/BIM-486323
American Medical Association (AMA)
Lin, Jyi-Tsong& Eng, Yi-Chuen& Lin, Po-Hsieh. A Novel Nanoscale FDSOI MOSFET with Block-Oxide. Active and Passive Electronic Components. 2013. Vol. 2013, no. 2013, pp.1-9.
https://search.emarefa.net/detail/BIM-486323
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-486323