The sputtering of target by charged particles and energy spectra of sputtered atoms
By: Kazim, Sana Thamir; Mutashir, Sahir Mizhir. University of Thi-Qar Journal. Vol. 11, no. 2 (Jun. 2016), pp.78-98, 21 p.
Subjects: Atoms; Chemistry; Mathematical models; Power distribution; Spectrometers