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Mechanical Properties and Thermal Stability of TiNTa Multilayer Film Deposited by Ion Beam Assisted Deposition
المؤلفون المشاركون
Shang, Hongfei
Li, Jian
Shao, Tianmin
المصدر
Advances in Materials Science and Engineering
العدد
المجلد 2014، العدد 2014 (31 ديسمبر/كانون الأول 2014)، ص ص. 1-8، 8ص.
الناشر
Hindawi Publishing Corporation
تاريخ النشر
2013-12-15
دولة النشر
مصر
عدد الصفحات
8
الملخص EN
TiN/Ta multilayer film with a modulation period of 5.6 nm and modulation ratio of 1 : 1 was produced by ion beam assisted deposition.
Microstructure of the as-deposited TiN/Ta multilayer film was observed by transmission electron microscopy and mechanical properties were investigated.
Residual stress in the TiN/Ta multilayer film was about 72% of that of a TiN monolayer film with equivalent thickness deposited under the same conditions.
Partial residual stress was released in the Ta sublayers during deposition, which led to the decrease of the residual stress of the TiN/Ta multilayer film.
Nanohardness (H) of the TiN/Ta multilayer film was 24 GPa, 14% higher than that of the TiN monolayer film.
It is suggested that the increase of the nanohardness is due to the introduction of the Ta layers which restrained the growth of TiN crystal and led to the decrease of the grain size.
A significant increase (3.5 times) of the H 3 / E 2 (E elastic modulus) value indicated that the TiN/Ta multilayer film has higher elasticity than the TiN monolayer film.
The L c (critical load in nano-scratch test) value of the TiN monolayer film was 45 mN, which was far lower than that of the TiN/Ta multilayer film (around 75 mN).
Results of the indentation test showed a higher fracture toughness of the TiN/Ta multilayer film than that of the TiN monolayer film.
Results of differential scanning calorimetric (DSC) and thermo gravimetric analysis (TGA) indicate that the TiN/Ta multilayer film has better thermal stability than the TiN monolayer film.
نمط استشهاد جمعية علماء النفس الأمريكية (APA)
Shang, Hongfei& Li, Jian& Shao, Tianmin. 2013. Mechanical Properties and Thermal Stability of TiNTa Multilayer Film Deposited by Ion Beam Assisted Deposition. Advances in Materials Science and Engineering،Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1015762
نمط استشهاد الجمعية الأمريكية للغات الحديثة (MLA)
Shang, Hongfei…[et al.]. Mechanical Properties and Thermal Stability of TiNTa Multilayer Film Deposited by Ion Beam Assisted Deposition. Advances in Materials Science and Engineering No. 2014 (2014), pp.1-8.
https://search.emarefa.net/detail/BIM-1015762
نمط استشهاد الجمعية الطبية الأمريكية (AMA)
Shang, Hongfei& Li, Jian& Shao, Tianmin. Mechanical Properties and Thermal Stability of TiNTa Multilayer Film Deposited by Ion Beam Assisted Deposition. Advances in Materials Science and Engineering. 2013. Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1015762
نوع البيانات
مقالات
لغة النص
الإنجليزية
الملاحظات
Includes bibliographical references
رقم السجل
BIM-1015762
قاعدة معامل التأثير والاستشهادات المرجعية العربي "ارسيف Arcif"
أضخم قاعدة بيانات عربية للاستشهادات المرجعية للمجلات العلمية المحكمة الصادرة في العالم العربي
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