Effect of Different Deposition Power of In2O3 Target on the Characteristics of IGZO Thin Films Using the Cosputtering Method
المؤلفون المشاركون
Hung, Shang-Chao
Liou, Yu-Jhen
Yang, Cheng-Fu
Lam, Artde Donald Kin-Tak
المصدر
International Journal of Photoenergy
العدد
المجلد 2014، العدد 2014 (31 ديسمبر/كانون الأول 2014)، ص ص. 1-7، 7ص.
الناشر
Hindawi Publishing Corporation
تاريخ النشر
2014-08-10
دولة النشر
مصر
عدد الصفحات
7
التخصصات الرئيسية
الملخص EN
The (In, Ga, Zn)O x (IGZO) thin films were deposited on glass substrates using cosputtering method in radio frequency magnetron sputtering system.
Zn2Ga2O5 (Ga2O3-2 ZnO, GZO) and In2O3 ceramics were used as targets and dual guns were used to deposit the IGZO thin films.
Deposition power of GZO target was 80 W and deposition power of pure In2O3 target was changed from 70 W to 100 W, and the deposition time was 30 min.
The effect of deposition power of In2O3 target on the crystalline, surface, electrical, and optical properties of the IGZO thin films was investigated at room temperature in a pure Ar atmosphere.
The cosputtered IGZO thin films showed a very smooth and featureless surface and an amorphous structure regardless of the deposition power of In2O3 target due to the room temperature sputtering process.
However, the cosputtered IGZO thin films exhibited transparent electrode properties because they had high transmittance ratio and low resistivity.
The value variations in the optical band gap ( E g ) values of the IGZO thin film were evaluated from the plots of ( α h ν ) 2 = c ( h ν - E g ) .
We would also show that the deposition power of In2O3 target would have a large effect on mobility and E g value of the IGZO thin films.
نمط استشهاد جمعية علماء النفس الأمريكية (APA)
Hung, Shang-Chao& Lam, Artde Donald Kin-Tak& Yang, Cheng-Fu& Liou, Yu-Jhen. 2014. Effect of Different Deposition Power of In2O3 Target on the Characteristics of IGZO Thin Films Using the Cosputtering Method. International Journal of Photoenergy،Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-1037305
نمط استشهاد الجمعية الأمريكية للغات الحديثة (MLA)
Hung, Shang-Chao…[et al.]. Effect of Different Deposition Power of In2O3 Target on the Characteristics of IGZO Thin Films Using the Cosputtering Method. International Journal of Photoenergy No. 2014 (2014), pp.1-7.
https://search.emarefa.net/detail/BIM-1037305
نمط استشهاد الجمعية الطبية الأمريكية (AMA)
Hung, Shang-Chao& Lam, Artde Donald Kin-Tak& Yang, Cheng-Fu& Liou, Yu-Jhen. Effect of Different Deposition Power of In2O3 Target on the Characteristics of IGZO Thin Films Using the Cosputtering Method. International Journal of Photoenergy. 2014. Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-1037305
نوع البيانات
مقالات
لغة النص
الإنجليزية
الملاحظات
Includes bibliographical references
رقم السجل
BIM-1037305
قاعدة معامل التأثير والاستشهادات المرجعية العربي "ارسيف Arcif"
أضخم قاعدة بيانات عربية للاستشهادات المرجعية للمجلات العلمية المحكمة الصادرة في العالم العربي
تقوم هذه الخدمة بالتحقق من التشابه أو الانتحال في الأبحاث والمقالات العلمية والأطروحات الجامعية والكتب والأبحاث باللغة العربية، وتحديد درجة التشابه أو أصالة الأعمال البحثية وحماية ملكيتها الفكرية. تعرف اكثر