Analysis of Closure Characteristics of a MEMS Omnidirectional Inertial Switch under Shock Loads

الملخص EN

A preliminary theoretical method for calculating contact time of a dual mass-spring system applied to shock acceleration was proposed based on the MEMS omnidirectional inertial switch.

The influence of relevant parameters on the contact time was analyzed, and the theoretical results were in agreement with the simulation predictions.

The theoretical method could provide the design of MEMS inertial switch for prolonged contact time.

The system stiffness of the mass-spring system in all directions was obtained by using the FE method.

Dynamic contact simulation results of contact time in typical directions under the applied shock acceleration indicate that the switch has a contact time within the range of 33 μs to 95 μs and has an enhanced contact effect with the dual mass-spring system in the MEMS inertial switch.

The fabricated switches were tested by a shock test device.

The results show that the switch can be reliably closed in all directions under the applied shock acceleration and has a long contact time, which is basically in accordance with the theoretical results.