Selected Aging Effects in Triaxial MEMS Accelerometers

الملخص EN

Natural aging of commercial triaxial low-g MEMS accelerometers, manufactured by surface micromachining, was evaluated in terms of changes of their offset voltages and scale factors, assigned to each sensitive axis.

Two pieces of two models of triaxial accelerometers (ADXL 330 and ADXL 327 by Analog Devices Inc.) with analog outputs were tested within a period of ca.

4.5 years.

Two different computer-controlled test rigs were used for performing relevant experimental studies, employing tilt angles as the reference source.

Methodology of determining the proposed indicators of aging was based on cyclic repetition of the calibration procedure for each accelerometer.

Changes of the output signals of the tested accelerometers were observed, resulting in respective indication errors of ca.

0.8% or even 2.2% while related to determining tilt.

Since the accelerometers were operated under mild conditions while tested, much bigger errors are to be expected in the case of harsh conditions.

Both pieces of ADXL 330 accelerometers ceased to operate properly within the testing period, approximately at the same time, for no apparent reason; thus, it is recommended to introduce redundancy in relevant reliable measuring circuits by doubling the number of the applied accelerometers.