Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

المؤلفون المشاركون

Yin, Guofu
Xu, Bin
Yin, Qin
Gui, Peng
Xu, Wei
Tang, Bin

المصدر

Journal of Nanomaterials

العدد

المجلد 2018، العدد 2018 (31 ديسمبر/كانون الأول 2018)، ص ص. 1-7، 7ص.

الناشر

Hindawi Publishing Corporation

تاريخ النشر

2018-11-22

دولة النشر

مصر

عدد الصفحات

7

التخصصات الرئيسية

الكيمياء
هندسة مدنية

الملخص EN

Microstructure-based function components are widely used in precision engineering.

Surface profile measurement is an essential tool to verify the manufacturing quality of microstructures and to enhance the working performance of the device employing microstructures as function components.

However, highly accurate surface profile measurements are difficult to perform for microstructures owing to their complex surface topographies.

In this paper, a measurement system is proposed for the surface profile measurement of microstructures.

The main components of the measurement system are a precision displacement stage to move the workpiece, a homemade probing system with a diamond microstylus to sense the surface profile variation of the microstructures on the workpiece, and a vibration isolation table to reduce the disturbance of the measurement environment.

In addition, the stability of the measurement was experimentally investigated.

Microstructures with shape of equilateral right triangle were employed as the measurement specimen, and the surface profile of triangular microstructures was measured by employing two methods to correct errors caused by the specimen inclination and the radius of the stylus tip.

The shape, depth, and period of the measured microstructures were also detected based on the results of the surface profile measurement.

Experimental results demonstrate the feasibility of the proposed surface profile measurement for microstructures with complex surface topographies.

نمط استشهاد جمعية علماء النفس الأمريكية (APA)

Yin, Qin& Xu, Bin& Yin, Guofu& Gui, Peng& Xu, Wei& Tang, Bin. 2018. Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System. Journal of Nanomaterials،Vol. 2018, no. 2018, pp.1-7.
https://search.emarefa.net/detail/BIM-1194519

نمط استشهاد الجمعية الأمريكية للغات الحديثة (MLA)

Yin, Qin…[et al.]. Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System. Journal of Nanomaterials No. 2018 (2018), pp.1-7.
https://search.emarefa.net/detail/BIM-1194519

نمط استشهاد الجمعية الطبية الأمريكية (AMA)

Yin, Qin& Xu, Bin& Yin, Guofu& Gui, Peng& Xu, Wei& Tang, Bin. Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System. Journal of Nanomaterials. 2018. Vol. 2018, no. 2018, pp.1-7.
https://search.emarefa.net/detail/BIM-1194519

نوع البيانات

مقالات

لغة النص

الإنجليزية

الملاحظات

Includes bibliographical references

رقم السجل

BIM-1194519