Analysis for X-ray diffraction pattern of annealed Fe2o3 thin films

الملخص EN

Modified Williamson-Hall (W-H) models were employed to estimate thechanging of the microstructural parameters of Fe2O3 thin films with increasingannealing temperature (Ta).

These models areW-H-anisotropic strain model (W-HASM), W-H-isotropic strain model (W-H-ISM) and W-H-energy density model(W-H-EDM).

To calculate crystallite size, Scherrer equation and its modifiedequation were used.

Also crystallite size, lattice stress, strain, dislocation density anddeformation energy density have been determined by these models.

By increasingTa, crystallite sizes were increased according to all models.

Three modified (W-H)models were used to calculate strain, it was negative and its values increase withTa.

According to W-H-ASM and W-H-EDM stress, dislocation density and latticestrain energy density reach minimum values when the temperature reaches (500)oC.