Characteristics of nanostructure porous silicon prepared by Anodization technique

الملخص EN

Porous silicon (PS) layers are prepared by anodization for different current densities.

The samples are then characterized the nanocrystalline porous silicon layer by X-Ray Diffraction (XRD), Atomic Force Microscopy (AFM), Fourier Transform Infrared (FTIR), Reflectivity and Raman.

PS layers were formed on a p-type Si wafer.

anodized electrically with a 10 and 40 mA/cm2 current density for fixed 20 min etching times.

We have estimated crystallites size from X-Ray diffraction about Nano scale for porous silicon and AFM confirms the nanometric size and therefore optical properties about nanocrystalline silicon yields a Raman spectrum showing a broadened peak shifted below 520 cm-1.