Fabrication and characterization of zinc oxide (ZnO)‎ thin films based humidity sensor with fast response by sol-gel method

المؤلفون المشاركون

Salah, Ghanim
Izz al-Din, Telia
Chahra, Boukaous

المصدر

Journal of New Technology and Materials / Larbi Ben M'hidi Oum el-Bouaghi University.

الناشر

جامعة العربي بن مهيدي بأم البواقي

تاريخ النشر

2014-05-31

دولة النشر

الجزائر

عدد الصفحات

4

التخصصات الرئيسية

العلوم الهندسية والتكنولوجية (متداخلة التخصصات)

الموضوعات

• الأرصاد الجوية
• الخواص الفيزيائية
• الرطوبة
• الطقس
• الرطوبة الجوية

الملخص الإنجليزي

Present work deals with deposition of Zinc oxide (ZnO) thin filmsby sol-gel method.

Sol was prepared using zinc acetate, 2-Methoxyethanol and monoethanolamine (MEA)as starting materials.

Films were grown using spin coating method and annealed at 500◦C.

ZnO films morphology was investigated by Scanning Electron Microscope.

SEM images reveal that films are composed with wrinkles network.Crystalline structure was studied by means of X-ray diffraction analysis.

XRD patterns exhibit three strong peaks (101), (002) and (100) planes assigned to Wurtzite structure.

The obtained results for electrical properties were reported.

Relative humidity sensing properties has been studied and determined by variation of electrical resistance measurements at various humidity levels.

Our experimental results showthat the temperature and morphology have strong influence on the response and recovery times of sensing.

نوع البيانات

أوراق مؤتمرات

رقم السجل

BIM-429921

• APA
• MLA
• AMA