Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process
المؤلفون المشاركون
Srivastava, P. C.
Rauthan, C. M. S.
Gope, Jhuma
Dayal, S.
Kumar, Sushil
Parashar, A.
المصدر
العدد
المجلد 2012، العدد 2012 (31 ديسمبر/كانون الأول 2012)، ص ص. 1-9، 9ص.
الناشر
Hindawi Publishing Corporation
تاريخ النشر
2012-07-17
دولة النشر
مصر
عدد الصفحات
9
التخصصات الرئيسية
الملخص EN
The mechanical properties of hydrogenated silicon thin films deposited using high-frequency PECVD process were studied, which certainly have importance for optoelectronic devices particularly for getting stability and long operating lifetime in harsh conditions.
Nanoindentation technique was used to measure the load versus displacement curves, hardness (H), elastic modulus (E), plastic resistance parameter (H/E), elastic recovery (ER), and plastic deformation energy (Ur), while laser scanning stress measurement setup was used to measure the intrinsic stress of these films.
The concentration of bonded hydrogen in these films was found in the range of 3.6 to 6.5 at.
% which was estimated using integrated intensity of IR absorption peak near 640 cm−1.
Dependence of mechanical properties of these films on hydrogen content and bonding environment has been investigated.
The film containing minimum hydrogen content (3.6%) shows the maximum elastic recovery (52.76%) and minimum plastic deformation energy (3.95×10−10 J).
Surface roughness measured by AFM was found to decrease with the increase in hydrogen content in the film.
The dependency of stress on the plasma frequency and applied power has also been discussed.
نمط استشهاد جمعية علماء النفس الأمريكية (APA)
Gope, Jhuma& Kumar, Sushil& Parashar, A.& Dayal, S.& Rauthan, C. M. S.& Srivastava, P. C.. 2012. Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process. ISRN Nanomaterials،Vol. 2012, no. 2012, pp.1-9.
https://search.emarefa.net/detail/BIM-471573
نمط استشهاد الجمعية الأمريكية للغات الحديثة (MLA)
Gope, Jhuma…[et al.]. Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process. ISRN Nanomaterials No. 2012 (2012), pp.1-9.
https://search.emarefa.net/detail/BIM-471573
نمط استشهاد الجمعية الطبية الأمريكية (AMA)
Gope, Jhuma& Kumar, Sushil& Parashar, A.& Dayal, S.& Rauthan, C. M. S.& Srivastava, P. C.. Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process. ISRN Nanomaterials. 2012. Vol. 2012, no. 2012, pp.1-9.
https://search.emarefa.net/detail/BIM-471573
نوع البيانات
مقالات
لغة النص
الإنجليزية
الملاحظات
Includes bibliographical references
رقم السجل
BIM-471573
قاعدة معامل التأثير والاستشهادات المرجعية العربي "ارسيف Arcif"
أضخم قاعدة بيانات عربية للاستشهادات المرجعية للمجلات العلمية المحكمة الصادرة في العالم العربي
تقوم هذه الخدمة بالتحقق من التشابه أو الانتحال في الأبحاث والمقالات العلمية والأطروحات الجامعية والكتب والأبحاث باللغة العربية، وتحديد درجة التشابه أو أصالة الأعمال البحثية وحماية ملكيتها الفكرية. تعرف اكثر