Properties of TiC Coating by Pulsed DC PACVD

الملخص EN

In the PACVD technique, temperature and gas flow rate are two important parameters affecting the coating characteristics.

Effect of these parameters on mechanical behaviors of TiC coating that was deposited on hot work tool steel (H13) was investigated in this paper.

We analyzed TiC coating composition and structure with grazing incidence X-ray diffraction (GIXRD) and Fourier transformation infrared spectroscopy (FTIR).

The mechanical properties of the coatings, such as microhardness, wear resistance, and surface roughness, were studied with Knoop hardness indentation, pin on disk wear tests, and atomic force microscopy, respectively.

When the deposition temperature decreased from 490°C to 450°C and the CH4 to TiCl4 flow rate ratio was also increased from 1.5 to 6, TiC coating color changed from dark gray to silver.

The best mechanical properties such as a high hardness (27 GPa), wear resistance, and low surface roughness were related to the coating that was deposited at 450°C.