![](/images/graphics-bg.png)
Design, Fabrication, and Testing of a SOI-MEMS-Based Active Microprobe for Potential Cellular Force Sensing Applications
المؤلفون المشاركون
المصدر
Advances in Mechanical Engineering
العدد
المجلد 2012، العدد 2012 (31 ديسمبر/كانون الأول 2012)، ص ص. 1-9، 9ص.
الناشر
Hindawi Publishing Corporation
تاريخ النشر
2012-07-22
دولة النشر
مصر
عدد الصفحات
9
التخصصات الرئيسية
الملخص EN
This paper presents the design, analysis, fabrication, and characterization of an electrostatically driven single-axis active probing device for the applications of cellular force sensing and materials characterization.
The active microprobe is actuated by linear comb drivers to generate the motion in the probing direction.
Both actuation and sensing comb-drive structures are designed for the probing stage.
The sensing comb structures enable us to sense the probe displacement when the device is actuated, which enables applications of force-balanced sensing and provides the capability of closed-loop control towards better accuracy.
The designed active probing device is fabricated on a silicon-on-insulator (SOI) substrate with a 10 μm thick device layer through surface micromachining technologies and deep reactive-ion etching (DRIE) process.
The handle layer beneath probe stage is etched away by DRIE process to decrease the film damping between the stage and the handle wafer thus achieving high-quality factor.
The fabricated stage provides a motion range of 14 μm at actuation voltage of 140 V.
The measured natural frequency of the stage is 1.5 kHz under ambient conditions.
A sensitivity of 6 fF/μm has been achieved.
The proposed single-axis probe is aimed at sensing cellular force which ranges from a few nano-Newton to μN and micromanipulation applications.
نمط استشهاد جمعية علماء النفس الأمريكية (APA)
Zhang, Li& Dong, Jingyan. 2012. Design, Fabrication, and Testing of a SOI-MEMS-Based Active Microprobe for Potential Cellular Force Sensing Applications. Advances in Mechanical Engineering،Vol. 2012, no. 2012, pp.1-9.
https://search.emarefa.net/detail/BIM-497954
نمط استشهاد الجمعية الأمريكية للغات الحديثة (MLA)
Zhang, Li& Dong, Jingyan. Design, Fabrication, and Testing of a SOI-MEMS-Based Active Microprobe for Potential Cellular Force Sensing Applications. Advances in Mechanical Engineering No. 2012 (2012), pp.1-9.
https://search.emarefa.net/detail/BIM-497954
نمط استشهاد الجمعية الطبية الأمريكية (AMA)
Zhang, Li& Dong, Jingyan. Design, Fabrication, and Testing of a SOI-MEMS-Based Active Microprobe for Potential Cellular Force Sensing Applications. Advances in Mechanical Engineering. 2012. Vol. 2012, no. 2012, pp.1-9.
https://search.emarefa.net/detail/BIM-497954
نوع البيانات
مقالات
لغة النص
الإنجليزية
الملاحظات
Includes bibliographical references
رقم السجل
BIM-497954
قاعدة معامل التأثير والاستشهادات المرجعية العربي "ارسيف Arcif"
أضخم قاعدة بيانات عربية للاستشهادات المرجعية للمجلات العلمية المحكمة الصادرة في العالم العربي
![](/images/ebook-kashef.png)
تقوم هذه الخدمة بالتحقق من التشابه أو الانتحال في الأبحاث والمقالات العلمية والأطروحات الجامعية والكتب والأبحاث باللغة العربية، وتحديد درجة التشابه أو أصالة الأعمال البحثية وحماية ملكيتها الفكرية. تعرف اكثر
![](/images/kashef-image.png)