Effect of Al doping on the structural and optical properties of SnO2 thin films elaborated by sol-gel technique

الملخص EN

In this study, the influence of increasing of the Al concentration on the structural and optical properties of SnO2 thin films were investigated.

Pure and aluminum-doped SnO2 thin films were prepared by sol–gel deposition method on glass and Si (100) substrates at room temperature and then annealed at 550°C in air.

The obtained films are characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), and UV–Vis spectrophotometry techniques.

A single-phase rutile polycrystalline structure is revealed by XRD.

The AFM analysis show that the surface morphology changes with Al concentration.

The un-doped and Al-doped SnO2 thin films are transparent (86% optical transmittance) in the near UV-Vis, and the optical band gap is influenced by Al doping level.