Synthesis of gold nanoparticles by laser ablation on porous silicon for sensing CO2 gas

الملخص EN

In this research, porous silicon (PS) prepared by anodization etching on surface of single crystalline p-type Si wafer, then Gold nanoparticle (AuNPs) prepared by pulsed laser ablation in liquid.

NPs deposited on PS layer by drop casting.

The morphology of PS, AuNPs and AuNPs/PS samples were examined by AFM.

The crystallization of this sample was characterized by X-ray diffraction (XRD).

The electrical properties and sensitivity to CO2 gas were investigated to Al/AuNPs/PS/c-Si/Al, we found that AuNPs plays crucial role to enhance this properties.