Investigation of densified SiO2 sol-gel thin films using conventional and DPSS laser techniques

الملخص EN

The prepared nanostructure SiO2 thin films were densified by two techniques (conventional and Diode Pumped Solid State Laser (DPSS) (532 nm).

X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM), and Atomic Force Microscope (AFM) technique were used to analyze the samples.

XRD results showed that the structure of SiO2 thin films was amorphous for both Oven and Laser densification.

FESEM and AFM images revealed that the shape of nano silica is spherical and the particle size is in nano range.

The small particle size of SiO2 thin film densified by DPSS Laser was (26 nm) , while the smallest particle size of SiO2 thin film densified by Oven was (111 nm).