Morphological and optical properties of porous silicon

الملخص EN

In this work photo-electrochemical etching was used to synthesize uniform and non-uniform macro porous silicon from n-type with orientation (100).

Specimens were anodized in a sol of 25% HF: C2H2OH at 1:1 rate.

Morphology and porosity of the samples were studied.

Optical characteristics (reflection and photoluminescence) of PS samples by changing current density (10, 12, 14 and 16 mA/cm2 ) for fixed etching time (8min) and power density (17mW/cm2 ) by using red laser illumination wavelength (645nm) were investigated.

Porous silicon samples imaged via scanning electron microscope (SEM), which showed the topography of silicon surface and pores distribution.