Investigation and comparison of electrical and optical properties of RF sputtered Cu doped ZnO and ZnO Cu ZnO multilayer films

الملخص EN

This study presents the comparison of structural, electrical and optical properties of Cu doped ZnO films and ZnO / Cu / ZnO multilayer films before and after annealing, they are produced via radio frequency magnetron sputtering.

the results showed that all films has a good crystalline properties after annealing, ZnO / Cu / ZnO multilayer films showed low resistivity of 1.8 × 10 -3 Ω.cm and an average transmittance of 75 %, these parameter values indicate that films are a potential candidate for high-quality electrodes in various displays.