Reactive ion etching (RIE) for micro and nanogap fabrication
By: Dahahi, Th. S.; Hashim, U.; Ahmad, N. M.. Journal of Basrah Researches : Sciences. Vol. 37, no. 2A (Apr. 2011), pp.11-20, 10 p.
Subjects: Audiences; Engineering; Islamic jurisprudence; Medicine; Nanotechnology