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3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles
Joint Authors
Abdul Rashid, Suraya
Othman, Siti Hajar
Abdullah, Norhafizah
Mohd Ghazi, Tinia Idaty
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-11, 11 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-10-02
Country of Publication
Egypt
No. of Pages
11
Main Subjects
Abstract EN
This paper presents the 3-dimensional (3D) computational fluid dynamics (CFD) simulation study of metal organic chemical vapor deposition (MOCVD) producing photocatalytic titanium dioxide (TiO2) nanoparticles.
It aims to provide better understanding of the MOCVD synthesis system especially of deposition process of TiO2 nanoparticles as well as fluid dynamics inside the reactor.
The simulated model predicts temperature, velocity, gas streamline, mass fraction of reactants and products, kinetic rate of reaction, and surface deposition rate profiles.
It was found that temperature distribution, flow pattern, and thermophoretic force considerably affected the deposition behavior of TiO2 nanoparticles.
Good mixing of nitrogen (N2) carrier gas and oxygen (O2) feed gas is important to ensure uniform deposition and the quality of the nanoparticles produced.
Simulation results are verified by experiment where possible due to limited available experimental data.
Good agreement between experimental and simulation results supports the reliability of simulation work.
American Psychological Association (APA)
Othman, Siti Hajar& Abdul Rashid, Suraya& Mohd Ghazi, Tinia Idaty& Abdullah, Norhafizah. 2013. 3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles. Journal of Nanomaterials،Vol. 2013, no. 2013, pp.1-11.
https://search.emarefa.net/detail/BIM-1007215
Modern Language Association (MLA)
Othman, Siti Hajar…[et al.]. 3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles. Journal of Nanomaterials No. 2013 (2013), pp.1-11.
https://search.emarefa.net/detail/BIM-1007215
American Medical Association (AMA)
Othman, Siti Hajar& Abdul Rashid, Suraya& Mohd Ghazi, Tinia Idaty& Abdullah, Norhafizah. 3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles. Journal of Nanomaterials. 2013. Vol. 2013, no. 2013, pp.1-11.
https://search.emarefa.net/detail/BIM-1007215
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1007215