One-Step Fabrication of Hierarchically Structured Silicon Surfaces and Modification of Their Morphologies Using Sacrificial Layers
Joint Authors
Cho, Seong J.
Seok, Se Yeong
Kim, Jin Young
Lim, Geunbae
Lim, Hoon
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-07-08
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Abstract EN
Fabrication of one-dimensional nanostructures is a key issue for optical devices, fluidic devices, and solar cells because of their unique functionalities such as antireflection and superhydrophobicity.
Here, we report a novel one-step process to fabricate patternable hierarchical structures consisting of microstructures and one-dimensional nanostructures using a sacrificial layer.
The layer plays a role as not only a micromask for producing microstructures but also as a nanomask for nanostructures according to the etching time.
Using this method, we fabricated patterned hierarchical structures, with the ability to control the shape and density of the nanostructure.
The various architectures provided unique functionalities.
For example, our sacrificial-layer etching method allowed nanostructures denser than what would be attainable with conventional processes to form.
The dense nanostructure resulted in a very low reflectance of the silicon surface (less than 1%).
The nanostructured surface and hierarchically structured surface also exhibited excellent antiwetting properties, with a high contact angle (>165°) and low sliding angle (<1°).
We believe that our fabrication approach will provide new insight into functional surfaces, such as those used for antiwetting and antireflection surface applications.
American Psychological Association (APA)
Cho, Seong J.& Seok, Se Yeong& Kim, Jin Young& Lim, Geunbae& Lim, Hoon. 2013. One-Step Fabrication of Hierarchically Structured Silicon Surfaces and Modification of Their Morphologies Using Sacrificial Layers. Journal of Nanomaterials،Vol. 2013, no. 2013, pp.1-8.
https://search.emarefa.net/detail/BIM-1007490
Modern Language Association (MLA)
Cho, Seong J.…[et al.]. One-Step Fabrication of Hierarchically Structured Silicon Surfaces and Modification of Their Morphologies Using Sacrificial Layers. Journal of Nanomaterials No. 2013 (2013), pp.1-8.
https://search.emarefa.net/detail/BIM-1007490
American Medical Association (AMA)
Cho, Seong J.& Seok, Se Yeong& Kim, Jin Young& Lim, Geunbae& Lim, Hoon. One-Step Fabrication of Hierarchically Structured Silicon Surfaces and Modification of Their Morphologies Using Sacrificial Layers. Journal of Nanomaterials. 2013. Vol. 2013, no. 2013, pp.1-8.
https://search.emarefa.net/detail/BIM-1007490
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1007490