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Incorporated W Roles on Microstructure and Properties of W-C:H Films by a Hybrid Linear Ion Beam Systems
Joint Authors
Guo, Peng
Ke, Peiling
Wang, Aiying
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-12-10
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Abstract EN
W-incorporated diamond-like carbon (W-C:H) films were fabricated by a hybrid beams system consisting of a DC magnetron sputtering and a linear ion source.
The W concentration (1.08~31.74 at.%) in the film was controlled by varying the sputtering current.
The cross-sectional topography, composition, and microstructure of the W-C:H films were investigated by SEM, XPS, TEM, and Raman spectroscopy.
The mechanical and tribological properties of the films as a function of W concentration were evaluated by a stress-tester, nanoindentation, and ball-on-disk tribometer, respectively.
The results showed that films mainly exhibited the feature of amorphous carbon when W concentration of the films was less than 4.38 at.%, where the incorporated W atoms would be bonded with C atoms and resulted in the formation of WC1-x nanoparticles.
The W-C:H film with 4.38 at.% W concentration showed a minimum value of residual compressive stress, a higher hardness, and better tribological properties.
Beyond this W concentration range, both the residual stress and mechanical properties were deteriorated due to the growth of tungsten carbide nanoparticles in the carbon matrix.
American Psychological Association (APA)
Guo, Peng& Ke, Peiling& Wang, Aiying. 2013. Incorporated W Roles on Microstructure and Properties of W-C:H Films by a Hybrid Linear Ion Beam Systems. Journal of Nanomaterials،Vol. 2013, no. 2013, pp.1-8.
https://search.emarefa.net/detail/BIM-1007921
Modern Language Association (MLA)
Guo, Peng…[et al.]. Incorporated W Roles on Microstructure and Properties of W-C:H Films by a Hybrid Linear Ion Beam Systems. Journal of Nanomaterials No. 2013 (2013), pp.1-8.
https://search.emarefa.net/detail/BIM-1007921
American Medical Association (AMA)
Guo, Peng& Ke, Peiling& Wang, Aiying. Incorporated W Roles on Microstructure and Properties of W-C:H Films by a Hybrid Linear Ion Beam Systems. Journal of Nanomaterials. 2013. Vol. 2013, no. 2013, pp.1-8.
https://search.emarefa.net/detail/BIM-1007921
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1007921