Crystallinity Improvement of ZnO Thin Film on Different Buffer Layers Grown by MBE
Joint Authors
Chang, Wen-Ming
Liao, Che-Hao
Yang, C. C.
Ting, Shao-Ying
Chen, Po-Ju
Wang, Hsiang-Chen
Hsieh, Ya-Ping
Source
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-05-10
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
The material and optical properties of ZnO thin film samples grown on different buffer layers on sapphire substrates through a two-step temperature variation growth by molecular beam epitaxy were investigated.
The thin buffer layer between the ZnO layer and the sapphire substrate decreased the lattice mismatch to achieve higher quality ZnO thin film growth.
A GaN buffer layer slightly increased the quality of the ZnO thin film, but the threading dislocations still stretched along the c-axis of the GaN layer.
The use of MgO as the buffer layer decreased the surface roughness of the ZnO thin film by 58.8% due to the suppression of surface cracks through strain transfer of the sample.
From deep level emission and rocking curve measurements it was found that the threading dislocations play a more important role than oxygen vacancies for high-quality ZnO thin film growth.
American Psychological Association (APA)
Ting, Shao-Ying& Chen, Po-Ju& Wang, Hsiang-Chen& Liao, Che-Hao& Chang, Wen-Ming& Hsieh, Ya-Ping…[et al.]. 2012. Crystallinity Improvement of ZnO Thin Film on Different Buffer Layers Grown by MBE. Journal of Nanomaterials،Vol. 2012, no. 2012, pp.1-7.
https://search.emarefa.net/detail/BIM-1029321
Modern Language Association (MLA)
Ting, Shao-Ying…[et al.]. Crystallinity Improvement of ZnO Thin Film on Different Buffer Layers Grown by MBE. Journal of Nanomaterials No. 2012 (2012), pp.1-7.
https://search.emarefa.net/detail/BIM-1029321
American Medical Association (AMA)
Ting, Shao-Ying& Chen, Po-Ju& Wang, Hsiang-Chen& Liao, Che-Hao& Chang, Wen-Ming& Hsieh, Ya-Ping…[et al.]. Crystallinity Improvement of ZnO Thin Film on Different Buffer Layers Grown by MBE. Journal of Nanomaterials. 2012. Vol. 2012, no. 2012, pp.1-7.
https://search.emarefa.net/detail/BIM-1029321
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1029321