A Kind of Coating Method of GaN-MOCVD Graphite Susceptor
Joint Authors
Jin, Li
Ying-lu, Hu
Wu, Xiao-feng
Hu, Shi-gang
Li, Hai-ou
Xi, Zai-fang
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-06-19
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
A novel coating method for the GaN-MOCVD graphite susceptor is proposed in the paper, which means that the upper surface and sides of the graphite susceptor are covered with a low emissivity material coating, and the surface under the susceptor is covered with a high emissivity SiC coating.
By using finite element analysis software COMSOL Multiphysics, the temperature field of the susceptors without coating, with common SiC coating, and with improved coating is obtained and compared, which shows that the susceptor with the improved coating not only increases the heating efficiency of the heater, but also improves the temperature uniformity of the substrate, which can be of great benefit to the film growth.
In addition, this improved coating for the susceptor has the same heating sensitivity as the common SiC coating.
American Psychological Association (APA)
Wu, Xiao-feng& Hu, Shi-gang& Li, Hai-ou& Jin, Li& Xi, Zai-fang& Ying-lu, Hu. 2013. A Kind of Coating Method of GaN-MOCVD Graphite Susceptor. Journal of Nanomaterials،Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-1031305
Modern Language Association (MLA)
Wu, Xiao-feng…[et al.]. A Kind of Coating Method of GaN-MOCVD Graphite Susceptor. Journal of Nanomaterials No. 2013 (2013), pp.1-6.
https://search.emarefa.net/detail/BIM-1031305
American Medical Association (AMA)
Wu, Xiao-feng& Hu, Shi-gang& Li, Hai-ou& Jin, Li& Xi, Zai-fang& Ying-lu, Hu. A Kind of Coating Method of GaN-MOCVD Graphite Susceptor. Journal of Nanomaterials. 2013. Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-1031305
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1031305