Modeling the Electrostatic Deflection of a MEMS Multilayers Based Actuator

Abstract EN

An actuator comprised of a rigid substrate and two parallelclamped-clamped microbeams is modeled under the influence ofelectrostatic loading.

The problem is considered under the contextof nonlinear Euler's mechanics, where the actuating system isdescribed by coupled integrodifferential equations with relevantboundary conditions.

Galerkin-based discretization is utilized toobtain a reduced-order model, which is solved numerically.

Actuators with different gap sizes between electrode and beams areinvestigated.

The obtained results are compared to simulationsgotten by the finite-element commercial software ANSYS.