Properties of RF-Sputtered PZT Thin Films with TiPt Electrodes
Joint Authors
Yan, Cui
Minglei, Yao
Qunying, Zhang
Xiaolong, Chen
Jinkui, Chu
Le, Guan
Source
International Journal of Polymer Science
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-02-27
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
Effect of annealing temperature and thin film thickness on properties of Pb(Zr0.53Ti0.47)O3 (PZT) thin film deposited via radiofrequency magnetron sputtering technique onto Pt/Ti/SiO2/Si substrate was investigated.
Average grain sizes of the PZT thin film were measured by atomic force microscope; their preferred orientation was studied through X-ray diffraction analysis.
Average residual stress in the thin film was estimated according to the optimized Stoney formula, and impedance spectroscopy characterization was performed via an intelligent LCR measuring instrument.
Average grain sizes of PZT thin films were 60 nm~90 nm and their average roughness was less than 2 nm.
According to X-ray diffraction analysis, 600°C is the optimal annealing temperature to obtain the PZT thin film with better crystallization.
Average residual stress showed that thermal mismatch was the decisive factor of residual stress in Pt/Ti/SiO2/Si substrate; the residual stress in PZT thin film decreased as their thickness increased and increased with annealing temperature.
The dielectric constant and loss angle tangent were extremely increased with the thickness of PZT thin films.
The capacitance of the device can be adjusted according to the thickness of PZT thin films.
American Psychological Association (APA)
Yan, Cui& Minglei, Yao& Qunying, Zhang& Xiaolong, Chen& Jinkui, Chu& Le, Guan. 2014. Properties of RF-Sputtered PZT Thin Films with TiPt Electrodes. International Journal of Polymer Science،Vol. 2014, no. 2014, pp.1-5.
https://search.emarefa.net/detail/BIM-1037554
Modern Language Association (MLA)
Yan, Cui…[et al.]. Properties of RF-Sputtered PZT Thin Films with TiPt Electrodes. International Journal of Polymer Science No. 2014 (2014), pp.1-5.
https://search.emarefa.net/detail/BIM-1037554
American Medical Association (AMA)
Yan, Cui& Minglei, Yao& Qunying, Zhang& Xiaolong, Chen& Jinkui, Chu& Le, Guan. Properties of RF-Sputtered PZT Thin Films with TiPt Electrodes. International Journal of Polymer Science. 2014. Vol. 2014, no. 2014, pp.1-5.
https://search.emarefa.net/detail/BIM-1037554
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1037554