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Growth and Characterization of Nanostructured TiCrN Films Prepared by DC Magnetron Cosputtering
Joint Authors
Patthanasettakul, V.
Chaiyakun, S.
Paksunchai, Chutima
Denchitcharoen, Somyod
Source
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-07-14
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Abstract EN
Nanostructured TiCrN films were grown on Si (100) wafers by reactive DC unbalanced magnetron cosputtering technique without external heating and voltage biasing to the substrates.
The effects of Ti sputtering current on the chemical composition, chemical state, electronic structure, crystal structure, and morphology of the TiCrN films were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscopy (AFM), and field emission scanning electron microscopy (FE-SEM), respectively.
The results showed that all prepared films were formed as an understoichiometric (Ti, Cr)N solid solution with the fcc B1 type phase.
The films exhibited a nanostructure with a crystallite size of less than 14 nm.
The deconvolution of XPS spectra revealed the chemical bonding between Ti, Cr, N, and O elements.
The addition of Ti contents led to the decrease of valence electrons filled in the d conduction bands which result in the change of binding energy of electrons in core levels.
The roughness of the films was found to increase with increasing ITi.
The cross-sectional morphology of the films showed columnar structure with dome tops.
American Psychological Association (APA)
Paksunchai, Chutima& Denchitcharoen, Somyod& Chaiyakun, S.& Patthanasettakul, V.. 2014. Growth and Characterization of Nanostructured TiCrN Films Prepared by DC Magnetron Cosputtering. Journal of Nanomaterials،Vol. 2014, no. 2014, pp.1-9.
https://search.emarefa.net/detail/BIM-1041684
Modern Language Association (MLA)
Paksunchai, Chutima…[et al.]. Growth and Characterization of Nanostructured TiCrN Films Prepared by DC Magnetron Cosputtering. Journal of Nanomaterials No. 2014 (2014), pp.1-9.
https://search.emarefa.net/detail/BIM-1041684
American Medical Association (AMA)
Paksunchai, Chutima& Denchitcharoen, Somyod& Chaiyakun, S.& Patthanasettakul, V.. Growth and Characterization of Nanostructured TiCrN Films Prepared by DC Magnetron Cosputtering. Journal of Nanomaterials. 2014. Vol. 2014, no. 2014, pp.1-9.
https://search.emarefa.net/detail/BIM-1041684
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1041684