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Mixed Phases at the Bottom Interface of Si-Doped AlGaN Epilayers of Optoelectronic Devices
Joint Authors
Yu, Chen-hui
Luo, Qing-zhou
Luo, Xiang-dong
Liu, Pei-sheng
Source
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-01-22
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
This paper presents an analysis of crystalline structures of Si-doped Al0.4Ga0.6N layers grown on not-intentionally doped AlGaN buffer layer with an AlN nucleation layer by metal organic chemical vapor deposition.
Weak cubic Al0.4Ga0.6N (002) and (103) reflection peaks are observed in high-resolution XRD θ/2θ scans and cubic Al0.4Ga0.6N (LO) mode in Raman scattering spectroscopy.
These cubic subgrains are localized at the bottom interface of Si-doped layer due to the pulsed lower growth temperature and rich hydrogen atmosphere at the start of silane injection.
Their appearance has no direct relationship with the buffer and nucleation layer.
This study is helpful not only to understand fundamental properties of high aluminum content Si-doped AlGaN alloys but also to provide specific guidance on the fabrication of multilayer optoelectronic devices where weak cubic subgrains potentially occur and exert complicated influences on the device performance.
American Psychological Association (APA)
Yu, Chen-hui& Luo, Qing-zhou& Luo, Xiang-dong& Liu, Pei-sheng. 2014. Mixed Phases at the Bottom Interface of Si-Doped AlGaN Epilayers of Optoelectronic Devices. Journal of Nanomaterials،Vol. 2014, no. 2014, pp.1-5.
https://search.emarefa.net/detail/BIM-1041846
Modern Language Association (MLA)
Yu, Chen-hui…[et al.]. Mixed Phases at the Bottom Interface of Si-Doped AlGaN Epilayers of Optoelectronic Devices. Journal of Nanomaterials No. 2014 (2014), pp.1-5.
https://search.emarefa.net/detail/BIM-1041846
American Medical Association (AMA)
Yu, Chen-hui& Luo, Qing-zhou& Luo, Xiang-dong& Liu, Pei-sheng. Mixed Phases at the Bottom Interface of Si-Doped AlGaN Epilayers of Optoelectronic Devices. Journal of Nanomaterials. 2014. Vol. 2014, no. 2014, pp.1-5.
https://search.emarefa.net/detail/BIM-1041846
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1041846