Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering
Joint Authors
Jiang, Jinlong
Wang, Qiong
Wang, Yubao
Xia, Zhang
Hao, Junying
Yang, Hua
Source
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-03-03
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
The titanium- and silicon-codoped a-C:H films were prepared at different applied bias voltage by magnetron sputtering TiSi target in argon and methane mixture atmosphere.
The influence of the applied bias voltage on the composition, surface morphology, structure, and mechanical properties of the films was investigated by XPS, AFM, Raman, FTIR spectroscopy, and nanoindenter.
The tribological properties of the films were characterized on an UMT-2MT tribometer.
The results demonstrated that the film became smoother and denser with increasing the applied bias voltage up to −200 V, whereas surface roughness increased due to the enhancement of ion bombardment as the applied bias voltage further increased.
The sp3 carbon fraction in the films monotonously decreased with increasing the applied bias voltage.
The film exhibited moderate hardness and the superior tribological properties at the applied bias voltage of −100 V.
The tribological behaviors are correlated to the H/E or H3/E2 ratio of the films.
American Psychological Association (APA)
Jiang, Jinlong& Wang, Qiong& Wang, Yubao& Xia, Zhang& Yang, Hua& Hao, Junying. 2014. Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering. Journal of Nanomaterials،Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-1042060
Modern Language Association (MLA)
Jiang, Jinlong…[et al.]. Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering. Journal of Nanomaterials No. 2014 (2014), pp.1-7.
https://search.emarefa.net/detail/BIM-1042060
American Medical Association (AMA)
Jiang, Jinlong& Wang, Qiong& Wang, Yubao& Xia, Zhang& Yang, Hua& Hao, Junying. Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering. Journal of Nanomaterials. 2014. Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-1042060
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1042060