Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor

Joint Authors

Wang, Yong
Sun, Fujun
Zhu, Junhui
Pang, Ming
Ru, Changhai

Source

Journal of Sensors

Issue

Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-8, 8 p.

Publisher

Hindawi Publishing Corporation

Publication Date

2014-11-24

Country of Publication

Egypt

No. of Pages

8

Main Subjects

Civil Engineering

Abstract EN

This paper reported a biaxial nanopositioning stage single-driven by piezoelectric motor.

The employed piezoelectric motor can perform two different driving modes, namely, AC drive mode to drive in long-stroke and at high-speed and DC scanning mode with the high-resolution of several nanometers, which satisfies the requirements of both long-stroke and nanoresolution.

To compensate for the effects of the variable friction force and some unpredictable disturbances, a novel backward error compensation (BEC) positioning control method integrated of the two driving modes and a double closed-loop PID controller system are proposed to obtain a high-accuracy positional motion.

The experiment results demonstrate that the nanopositioning stage with large travel range of 300 mm × 300 mm has a fine speed characteristic and resolution is 5 nm.

In the experiments of different travels up to 15 mm, calibrated by a commercial laser vibrometer, the positioning accuracy is proved within 55 nm in x-axis and 40 nm in y-axis with standard deviation less than 40 nm in x-axis and 30 nm in y-axis and the final position locking can be limited to 10 nm, meeting the requirements of micromanipulation technology.

American Psychological Association (APA)

Wang, Yong& Sun, Fujun& Zhu, Junhui& Pang, Ming& Ru, Changhai. 2014. Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor. Journal of Sensors،Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1042991

Modern Language Association (MLA)

Wang, Yong…[et al.]. Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor. Journal of Sensors No. 2014 (2014), pp.1-8.
https://search.emarefa.net/detail/BIM-1042991

American Medical Association (AMA)

Wang, Yong& Sun, Fujun& Zhu, Junhui& Pang, Ming& Ru, Changhai. Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor. Journal of Sensors. 2014. Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1042991

Data Type

Journal Articles

Language

English

Notes

Includes bibliographical references

Record ID

BIM-1042991