Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor
Joint Authors
Wang, Yong
Sun, Fujun
Zhu, Junhui
Pang, Ming
Ru, Changhai
Source
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-11-24
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Abstract EN
This paper reported a biaxial nanopositioning stage single-driven by piezoelectric motor.
The employed piezoelectric motor can perform two different driving modes, namely, AC drive mode to drive in long-stroke and at high-speed and DC scanning mode with the high-resolution of several nanometers, which satisfies the requirements of both long-stroke and nanoresolution.
To compensate for the effects of the variable friction force and some unpredictable disturbances, a novel backward error compensation (BEC) positioning control method integrated of the two driving modes and a double closed-loop PID controller system are proposed to obtain a high-accuracy positional motion.
The experiment results demonstrate that the nanopositioning stage with large travel range of 300 mm × 300 mm has a fine speed characteristic and resolution is 5 nm.
In the experiments of different travels up to 15 mm, calibrated by a commercial laser vibrometer, the positioning accuracy is proved within 55 nm in x-axis and 40 nm in y-axis with standard deviation less than 40 nm in x-axis and 30 nm in y-axis and the final position locking can be limited to 10 nm, meeting the requirements of micromanipulation technology.
American Psychological Association (APA)
Wang, Yong& Sun, Fujun& Zhu, Junhui& Pang, Ming& Ru, Changhai. 2014. Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor. Journal of Sensors،Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1042991
Modern Language Association (MLA)
Wang, Yong…[et al.]. Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor. Journal of Sensors No. 2014 (2014), pp.1-8.
https://search.emarefa.net/detail/BIM-1042991
American Medical Association (AMA)
Wang, Yong& Sun, Fujun& Zhu, Junhui& Pang, Ming& Ru, Changhai. Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor. Journal of Sensors. 2014. Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1042991
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1042991