Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator
Joint Authors
Mohd Said, Suhana
Megat Hasnan, Megat Muhammad Ikhsan
Mohd Sabri, Mohd Faizul
Nik Ghazali, Nik Nazri
Source
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-07-24
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Medicine
Information Technology and Computer Science
Abstract EN
This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator.
This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actuation force.
Two-dimensional finite element analysis was used to simulate the motion of the fishbone shaped electrostatic comb drive actuator and compared against the performance of a straight sided electrostatic comb drive actuator.
Performances of both designs are evaluated by comparison of displacement and electrostatic force.
For both cases, the active area and the minimum gap distance between the two electrodes were constant.
An active area of 800 × 300 μm, which contained 16 fingers of fishbone shaped actuators and 40 fingers of straight sided actuators, respectively, was used.
Through simulation, improvement of drive force of the fishbone shaped electrostatic comb driver is approximately 485% higher than conventional electrostatic comb driver.
These results indicate that the fishbone actuator design provides good potential for applications as high force density electrostatic microactuator in MEMS systems.
American Psychological Association (APA)
Megat Hasnan, Megat Muhammad Ikhsan& Mohd Sabri, Mohd Faizul& Mohd Said, Suhana& Nik Ghazali, Nik Nazri. 2014. Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator. The Scientific World Journal،Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1051572
Modern Language Association (MLA)
Megat Hasnan, Megat Muhammad Ikhsan…[et al.]. Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator. The Scientific World Journal No. 2014 (2014), pp.1-8.
https://search.emarefa.net/detail/BIM-1051572
American Medical Association (AMA)
Megat Hasnan, Megat Muhammad Ikhsan& Mohd Sabri, Mohd Faizul& Mohd Said, Suhana& Nik Ghazali, Nik Nazri. Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator. The Scientific World Journal. 2014. Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1051572
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1051572