Design of a Novel W-Sinker RF LDMOS
Joint Authors
Xu, Xiangming
Yu, Han
Huang, Jingfeng
Wang, Chun
Ji, Wei
Zhou, Zhengliang
Cai, Ying
Wang, Yong
Li, Pingliang
Wang, Peng-Fei
Zhang, David Wei
Source
Advances in Condensed Matter Physics
Issue
Vol. 2015, Issue 2015 (31 Dec. 2015), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2015-04-23
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
A novel RF LDMOS device structure and corresponding manufacturing process are presented in this paper.
Deep trench W-sinker (tungsten sinker) is employed in this technology to replace the traditional heavily doped diffusion sinker which can shrink chip size of the LDMOS transistor by more than 30% and improve power density.
Furthermore, the W-sinker structure reduces the parasitic resistance and inductance and improves thermal conductivity of the device as well.
Combined with the adoption of the techniques, like grounded shield, step gate oxide, LDD optimization, and so forth, an advanced technology for RF LDMOS based on conventional 0.35 μ m CMOS technology is well established.
An F + A power amplifier product with frequency range of 1.8–2.1 GHz is developed for the application of 4G LTE base station and industry leading performance is achieved.
The qualification results show that the device reliability and ruggedness can also meet requirement of the application.
American Psychological Association (APA)
Xu, Xiangming& Yu, Han& Huang, Jingfeng& Wang, Chun& Ji, Wei& Zhou, Zhengliang…[et al.]. 2015. Design of a Novel W-Sinker RF LDMOS. Advances in Condensed Matter Physics،Vol. 2015, no. 2015, pp.1-5.
https://search.emarefa.net/detail/BIM-1052245
Modern Language Association (MLA)
Xu, Xiangming…[et al.]. Design of a Novel W-Sinker RF LDMOS. Advances in Condensed Matter Physics No. 2015 (2015), pp.1-5.
https://search.emarefa.net/detail/BIM-1052245
American Medical Association (AMA)
Xu, Xiangming& Yu, Han& Huang, Jingfeng& Wang, Chun& Ji, Wei& Zhou, Zhengliang…[et al.]. Design of a Novel W-Sinker RF LDMOS. Advances in Condensed Matter Physics. 2015. Vol. 2015, no. 2015, pp.1-5.
https://search.emarefa.net/detail/BIM-1052245
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1052245