A Modified FNN Fault Diagnosis on PCVD Microwave System

Abstract EN

A modified FNN fault diagnosis algorithm is presented in this paper for microwave subsystem of Plasma Chemical Vapor Deposition (PCVD).

The symptom variables are selected as the crisp inputs, and the corresponding membership functions are obtained from premeasured data as well as experts’ diagnostic experience/knowledge.

The prior probability and the restriction coefficients are combined into the FNN algorithm via matrix operator.

This modified FNN algorithm is verified for PCVD fault diagnosis application and realizes the MIMO for multifault mode diagnosis.