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Laser Micromachining of Glass, Silicon, and Ceramics
Joint Authors
Source
Advances in Materials Science and Engineering
Issue
Vol. 2015, Issue 2015 (31 Dec. 2015), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2015-03-11
Country of Publication
Egypt
No. of Pages
6
Abstract EN
A brief review is focused on laser micromachining of materials.
Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace.
This method is a promising tool for material processing with micron and submicron resolution.
In this paper micromachining of glass, silicon, and ceramics is considered.
Interaction of these materials with laser radiation and recent research held on laser material treatment is provided.
American Psychological Association (APA)
Rihakova, L.& Chmelickova, H.. 2015. Laser Micromachining of Glass, Silicon, and Ceramics. Advances in Materials Science and Engineering،Vol. 2015, no. 2015, pp.1-6.
https://search.emarefa.net/detail/BIM-1053362
Modern Language Association (MLA)
Rihakova, L.& Chmelickova, H.. Laser Micromachining of Glass, Silicon, and Ceramics. Advances in Materials Science and Engineering No. 2015 (2015), pp.1-6.
https://search.emarefa.net/detail/BIM-1053362
American Medical Association (AMA)
Rihakova, L.& Chmelickova, H.. Laser Micromachining of Glass, Silicon, and Ceramics. Advances in Materials Science and Engineering. 2015. Vol. 2015, no. 2015, pp.1-6.
https://search.emarefa.net/detail/BIM-1053362
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1053362